| Experiment No. | Substrate Temperature Tsub (K) | Hydrogen Flow rate | Methane Flow rate | Oxygen Flow rate | Total pressure P (mbar) | Microwave power Pmw (Watt) |
| OPTI | 1123 | 90 | 10 | 1 | 10 | 342.82 |
| Experiment No. | Substrate Temperature Tsub (K) | Hydrogen Flow rate | Methane Flow rate | Oxygen Flow rate | Total pressure P (mbar) | Microwave power Pmw (Watt) |
| OPTI | 1123 | 90 | 10 | 1 | 10 | 342.82 |
(sccm)
(sccm)
(sccm)