Experiment No. | Substrate Temperature Tsub (K) | Hydrogen Flow rate (sccm) | Methane Flow rate (sccm) | Oxygen Flow rate (sccm) | Total pressure P (mbar) | Microwave power Pmw (Watt) |
OPTI | 1123 | 90 | 10 | 1 | 10 | 342.82 |